Alignment Stability Engineering

Alignment Stability for Real Production.

PRT focuses on engineering that improves substrate-to-mask alignment stability before exposure.

Core Alignment Engineering

01

Vision-Based Alignment

Alignment marks are checked to identify deviation between the substrate position and the reference geometry.

02

Material Deviation Compensation

Material shrinkage and deformation caused by plating, etching, and heat treatment are corrected step by step.

03

Production Condition Tuning

Equipment conditions are adjusted according to material condition and line speed to maintain stable alignment in production lines.

Concept Visualization

Alignment Correction Sequence

Distorted material is gradually corrected toward the reference position.

Alignment Sequence
MaterialReference
Blue · Reference exposure positionPurple · Distorted material position
Material distortionPosition offsetVision detectionStep-by-step correctionStable alignment

Concept diagram — the distorted substrate geometry is corrected step by step until it converges closely to the reference exposure geometry (abstract, not actual values).

Actual Monitor Example

Actual Monitor Example

Actual monitor capture sequence showing alignment correction.

Initial Deviation

Initial Deviation → Corrected Result

Correction Result Example

Average deviation

17.1µm5.4µm

Approx. 68% reduction

CornerBefore After
E714.23.0µm
E817.15.3µm
E317.74.0µm
E419.39.3µm

In this sample sequence, corner deviation was reduced from an average of 17.1 µm to 5.4 µm.

Results may vary depending on material condition, line setup, and process environment.

Alignment Engineering

Material Distortion & Alignment Correction

Leadframe and semiconductor packaging processes can cause subtle material shrinkage and deformation through plating, etching, and heat treatment.

PRT systems focus on reducing alignment deviation before exposure through vision-based detection and dedicated correction methods.

Internal Tuning Note

PRT exposure systems are designed to compensate for material-related alignment deviation. Under defined material and process conditions, deviation in the 20–30 µm range can be corrected to the around-10 µm level or below.

These figures refer to compensated deviation on deformed production material, and are distinct from the equipment's nominal alignment accuracy specification.

Technical Confidentiality

Detailed correction structures and process recipes are configured according to customer line conditions, and specific implementation details are not disclosed in public materials.

Standard Components for Long-Term Serviceability

PRT equipment uses standard industrial components selected for long-term serviceability, replacement availability, and stable operation in production environments.

THKRexrothSMCOmronMitsubishiPanasonicKeyenceSPGOther Components

Applied component brands may vary depending on model, configuration, and customer requirements.

Need to review alignment stability for your production line?

Engineering | PRT Co., Ltd.