Alignment Stability Engineering
Alignment Stability for Real Production.
PRT focuses on engineering that improves substrate-to-mask alignment stability before exposure.
Core Alignment Engineering
Vision-Based Alignment
Alignment marks are checked to identify deviation between the substrate position and the reference geometry.
Material Deviation Compensation
Material shrinkage and deformation caused by plating, etching, and heat treatment are corrected step by step.
Production Condition Tuning
Equipment conditions are adjusted according to material condition and line speed to maintain stable alignment in production lines.
Concept Visualization
Alignment Correction Sequence
Distorted material is gradually corrected toward the reference position.
Concept diagram — the distorted substrate geometry is corrected step by step until it converges closely to the reference exposure geometry (abstract, not actual values).
Actual Monitor Example
Actual Monitor Example
Actual monitor capture sequence showing alignment correction.
Initial Deviation → Corrected Result
Correction Result Example
Average deviation
17.1µm→5.4µm
Approx. 68% reduction
In this sample sequence, corner deviation was reduced from an average of 17.1 µm to 5.4 µm.
Results may vary depending on material condition, line setup, and process environment.
Alignment Engineering
Material Distortion & Alignment Correction
Leadframe and semiconductor packaging processes can cause subtle material shrinkage and deformation through plating, etching, and heat treatment.
PRT systems focus on reducing alignment deviation before exposure through vision-based detection and dedicated correction methods.
Internal Tuning Note
PRT exposure systems are designed to compensate for material-related alignment deviation. Under defined material and process conditions, deviation in the 20–30 µm range can be corrected to the around-10 µm level or below.
These figures refer to compensated deviation on deformed production material, and are distinct from the equipment's nominal alignment accuracy specification.
Technical Confidentiality
Detailed correction structures and process recipes are configured according to customer line conditions, and specific implementation details are not disclosed in public materials.
Standard Components for Long-Term Serviceability
PRT equipment uses standard industrial components selected for long-term serviceability, replacement availability, and stable operation in production environments.
Applied component brands may vary depending on model, configuration, and customer requirements.
Need to review alignment stability for your production line?